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EuronanoLab, Dry Etching Experts Meeting, Paris 2019

12-13 Dec 2019
C2N Centre de Nanosciences et de Nanotechnologies - PALAISEAU (France)

This meeting is a workshop about Dry Etching in general for micro and nano fabrication. The aim is to achieve a European network about micro and nano fabrication. We can exchange about cold plasma for dry etching, process, technical issues and the acquisition of new machines.
Scientific domain : Micro and nanotechnologies/Microelectronics - Plasmas

Place of the conference
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